| 000 | 00394nam a2200133Ia 4500 | ||
|---|---|---|---|
| 008 | 140122s9999 xx 000 0 und d | ||
| 020 | _a0195693272 | ||
| 082 | _a620.5 TAN | ||
| 100 | _aTaniguchi Norio | ||
| 245 | _aNanotechnology : Integrated processing systems for ultra-precision and ultra-fine products | ||
| 260 |
_bOxford University Press _c2008 |
||
| 300 | _axiv,406pp | ||
| 942 |
_cBK _2ddc |
||
| 999 |
_c9670 _d9670 |
||